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6.4.4
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(c) Angle button
Selects an angle measurement. This is selectable when measurement mode is
Manual.
(7) Edge Detect Direction
Select an edge detect direction of the cursor box that specifies the position including edge
to be detected, when X or Y has been selected as the measuring direction. This is
selectable when measurement mode is Auto. The icon changes with the type of
measurement and measurement mode. When Angle measurement has been selected,
then select the circle cursor for the side to be measured.
(8) Parameters
Select parameters for the auto measurement.
(a) Measurement Point combo box
Enter a numeric value for number of measurement points. When "2" or higher is
specified, measurement is performed according to the specified number of
measurement points while shifting the scan line at Multi Pitch (described below).
Then the average value (Width), maximum value (Max), minimum value (Min) and
standard deviation (3 Sigma) are indicated.
(b) Measurement Pitch combo box
Specify a scan-line pitch to be used for averaging signal profiles (line profiles)
corresponding to scan lines. If "2" is specified, for instance, line profiles are taken
every other scan line according to the number of summing lines (described below) to
provide one profile for edge detection. This parameter is specifiable in a range of 1 to
64.
(c) Summing Line combo box
According to the specified number of scan lines, line profiles are averaged for edge
detection. If "8" is specified, for example, line profiles corresponding to eight scan
lines are averaged. As the number of summing lines increases, an adverse effect of
noise is reduced. This parameter is specifiable in a range of 1 to 64.
(d) Multi Pitch combo box
Specify an interval of Measurement Point when two or more measurement points are
used. This parameter is specifiable in a range of 2 to 64 represented in unit of
number of scan lines.
(e) Smoothing combo box
This parameter indicates a factor of line profile smoothing on a scan line. It is allowed
to select 1, 3, 5 or 7 represented in unit of number of pixels in smoothing. The
smoothing can reduce noise contained in the SEM image signal (line profile). Using
signal profile data obtained through the Summing Line function (described above) and
the Smoothing function, edge detection is carried out in the specified method (linear
approximation or threshold level method).