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3.5 Operation for Image Observation
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(c) 3D mode
This mode produces enhanced Topographic or 3D images with a mixture of specimen
surface composition information and topology information. Each pressing of the 3D
mode button changes the intensity of shading.
Fig. 3.5-8 3D Mode
For BSE Gain, normally select a level 3. If the amount of detected backscattered
electrons is large and the image contrast appears to be too strong, change the Gain to 2
or 1. Conversely, if the image contrast is too low due to a low detection amount of
backscattered electrons, the Gain setting should be changed to 4.
NOTICE: At a BSE Gain level or 4 or 3, depending on the characteristic of the detector, the
observed image may drift sideways during fast scanning, such as in the TV or FAST
scanning mode, resulting in an unclear image. In such a case, either select the
SLOW scanning mode or increase the probe current so that the BSE Gain level can
be set low.
(2) Detailed settings of the BSE
For detailed detector sensor settings, press the Detail button in the DETECTOR block to
bring up a BSE dialog, which allows you to turn individual sensor signals on and off and
select signal polarity reversal/non-reversal.