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3.5 Operation for Image Observation
3 - 94
• Restrictions on positive angles of tilt (when an optional detector is not used)
Fig. 3.5-67 Tiltable Angles with respect to Z-axis Positions (Type I Stage)
(negative angles of tilt)
(3) Limitation and evacuation when an optional detector is inserted
Some optional detectors have sensor switches and are automatically sensed when they are
inserted. For detectors not having such sensor switches, it is necessary to set detector in
use correctly in the Set Sample Size/Detector dialog box. If a detector having sensor
switch is inserted when present stage position is out of allowable area, the stage will
evacuate to the safe position as follows.
(a) EDX detector
No limitation required.
(b) WDX detector (made by Oxford Corporation) used:
∅5-inch (127 mm) specimens are restricted to X: 0.0 ~ 85.0 mm in mechanical
coordinates.
∅6-inch (153 mm) specimens are restricted to X: 0.0 ~ 72.0 mm in mechanical
coordinates.
∅8-inch (200 mm) specimens cannot be loaded.
NOTICE: If the stage positions (X, Y, Z, and T) are outside the movable range when a detector
is inserted, and if a detector equipped with a detection sensor is inserted, the stage
will be forced to undergo retraction motions.
-25
-20
-15
-10
-5
0
0 5 10 15 20 25 30 35 40 45 50 55 60 65
Z [mm]
T [deg]
∅15 mm
∅26 mm
∅32 mm
∅51 mm
∅200 mm
∅153 mm
∅127 mm
∅102 mm
∅77, ∅85 mm