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6.4 CD Measurement Function (Option)
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6.4 CD Measurement Function (Option)
6.4.1 Outline
6.4.1.1 CD Measurement Function
The CD Measurement function is designed for carrying out measurement of a critical-dimension
or angle at a specified position on a SEM image, and then displaying and recording the result.
The Measurement function comes in various modes - manual, automatic, successive
measurement, simultaneous width and pitch measurement, and so on. This allows selecting
and applying a measurement method from among these that is suitable for your purpose.
Figure 6.4-1 shows an example of the operating window for the CD Measurement function.
Fig. 6.4-1 Example of Operating Window for CD Measurement
6.4.1.2 CD Measurement Function Options
The following two CD measurement function options are available.
(1) CD Measurement Function Option for SEM Main Unit
Permits measurement of images displayed on the Scanning Image window of the SEM
main unit.
(2) CD Measurement Function Option for SEM Data Manager
Allows measurement of the images saved on the SEM data manager that is operated on a
different PC from the SEM data manager of the SEM main unit.