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2.3.6.2 Electron Gun Control Unit ........................................................2 - 26
2.3.6.3 Scan Control Windows.............................................................2 - 27
2.3.6.4 Auto Control.............................................................................2 - 28
2.3.6.5 Magnification Control................................................................2 - 30
2.3.6.6 Capture Control........................................................................2 - 31
2.3.6.7 Image Recording Control .........................................................2 - 33
2.3.6.8 EVAC/AIR Control....................................................................2 - 35
2.3.6.9 Stage Control...........................................................................2 - 36
2.3.6.10 Extension for Dual Screen Mode..............................................2 - 37
2.3.7 Operation Panel .......................................................................................2 - 38
2.3.7.1 ELECTRON BEAM Window.....................................................2 - 39
2.3.7.2 Focusing Position (WD) WORKING DISTANCE Window ........2 - 40
2.3.7.3 VACUUM MODE Window ........................................................2 - 41
2.3.7.4 SCAN MODE Window..............................................................2 - 42
2.3.7.5 CONDITION LOAD/SAVE Window ..........................................2 - 43
2.3.7.6 SCREEN MODE Window.........................................................2 - 43
2.3.7.7 DETECTOR Window................................................................2 - 44
2.3.7.8 IMAGE SHIFT Window ............................................................2 - 44
2.3.7.9 R.ROTATION Window .............................................................2 - 45
2.3.7.10 SIGNAL PROCESSING Window..............................................2 - 46
2.3.7.11 DATA ENTRY Window.............................................................2 - 47
2.3.7.12 TILT COMPENSATION Window ..............................................2 - 47
2.3.7.13 Other........................................................................................2 - 48
2.3.8 Mouse Operation on the Scanning Image ................................................2 - 49
2.3.8.1 Exchanging Mouse Control Functions......................................2 - 49
2.3.8.2 Focus/Stigma/Contrast/Brightness Adjustment ........................2 - 49
2.3.8.3 Stage and Image Shift Tools....................................................2 - 51
2.3.9 Setup Dialog Window...............................................................................2 - 52
2.3.9.1 Optics Tab................................................................................2 - 53
2.3.9.2 Image Tab................................................................................2 - 55
2.3.9.3 Record Tab ..............................................................................2 - 56
2.3.9.4 OP. Cond Tab..........................................................................2 - 58
2.3.10 Captured Image Window..........................................................................2 - 59
2.3.11 SEM Data Manager Window....................................................................2 - 61
2.3.12 Alignment Dialog Window ........................................................................2 - 61
2.3.13 CD Measurement Dialog Window (option) ...............................................2 - 62
2.3.14 Login Setting Dialog Window ...................................................................2 - 62
2.3.15 Oblique Dialog Window............................................................................2 - 63
2.3.16 Password Setting Dialog Window ............................................................2 - 63
2.3.17 Save Image Dialog Window.....................................................................2 - 64
2.3.18 Opt Signal Processing Dialog Window.....................................................2 - 64
2.3.19 Split/Dual Mag Controller .........................................................................2 - 65
2.3.20 Using Short-cut Keys ...............................................................................2 - 65