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3.5.7
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(9) Z axis continuous driving
On the rectangles at the top and bottom of Z-axis tool, mouse pointer will be changed as
shown below.
Fig. 3.5-44 Z-axis Moving Tool (continuous move)
Press down the left button on one of the rectangles. The stage will go up or down
continuously while holding the button down. On the top rectangle, stage moves to a
shorter Z, and on the bottom, to a longer Z.
Z motion will stop when it reaches the end of allowable range calculated using the present
Tilt angle.
(10) Tilt axis operation to a specified coordinate
On the circle of the Tilt axis tool, mouse pointer will be changed as shown below.
Fig. 3.5-45 Tilt-axis Moving Tool (coordinates specification)
Press down the left button and move the mouse up or downward while holding down the
button. The circle moves following the mouse and the Tilt axis value is shown in the
indicator box. Then release the button. Stage will go to the Tilt angle specified in the
indicator box.
The change of Tilt is limited to a range allowable for the present Z value.