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3.2 Mounting a Specimen
3 - 14
(2) Loading a Specimen
(a) Set the specimen holder on the specimen holder receptacle on the stage.
(b) Using the handles on both sides of the specimen stage, push the stage into the chamber.
(c) Set the specimen height and specimen size
Refer to 3.2.4.2 Measuring and Setting the Specimen Height
(2) Setting the Specimen Height and Specimen Size
IMPORTANT: Do not touch the operation parts such as gears and driving screws and note that
clothes are never placed when you bring the hand close to the movement
mechanism in the specimen stage by the specimen exchange, etc.
IMPORTANT: The height of a specimen should be measured with great care. Be sure to set
the specimen size and height on the Stage Control menu. If they are not
properly set, when the specimen is tilted or Stage Z is small, the specimen can
touch the objective lens or the backscattered electron detector that is provided
on the underside of the objective lens, potentially causing damage to the
specimen, objective lens, and backscattered electron detector.
(d) Press the EVAC button on the front EVAC Panel located on the front side of the main
unit or click EVAC located in the upper right section of the Control Panel. Evacuation of
the specimen chamber then commences. After approximately 2 minutes accelerating
voltage can then be energized.
EVAC Panel Control Panel
Fig. 3.2-17 EVAC Button (evacuating the specimen chamber)
CAUTION: When inserting the stage into the specimen chamber, be careful so that your
fingers will not be caught between the stage and the specimen chamber.
IMPORTANT: When evacuating the chamber, be sure to hold the stage tightly against the
chamber to ensure a tight fit before turning the evacuation process on.
Evacuation cannot take place unless the specimen stage has a tight fit with the
chamber.