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3.4 Adjusting the Electron Optical System
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3.4 Adjusting the Electron Optical System
3.4.1 Setting Parameters for the Electron Optical System
Parameters for the electron optical system can be set in two locations:
(1) Condition Tab (on the Control Panel)
On the Condition tab, accelerating voltage Vacc, Probe Current, focusing position
WORKING DISTANCE, and DETAIL can be set and selected.
Fig. 3.4-1 Setting Electron Optical System Parameters on the Condition Tab