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5.2 Replacement Parts
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5.2 Replacement Parts
The items below should be prepared in the necessary quantities.
Table 5.2-1 Replacement Parts
Part No. Part Name Use Expiration
J386042 Photomultiplier R2649 Secondary electron detector 5 years
TMP exchange service Turbo molecular pump 3 years
50E-1205 Scintillator SE detector 3 years
K433004 Pirani gauge bulb Evacuation system 3 years
52E-4501 Rubber tube for evacuation Evacuation system 5 years
F229251 Vinyl tube Evacuation system 3 years
51E-1528 Rotary pump Evacuation system 5 years
PC monitor PC 5 years
Hard disk PC 3 years
Keyboard PC 3 years
Mouse PC 2 years
Battery for PC PC 2 years
K429012 Rotary encoder Manual operation panel (Mag.) 3 years
K429013 Rotary encoder Manual operation panel (others) 5 years
52E-2384 Pulse motor X Type II stage 4 years
52E-2385 Pulse motor Y Type II stage 4 years
52E-2386 Pulse motor Z Type II stage 4 years
52E-2387 Pulse motor R Type II stage 4 years
52E-2388 Pulse motor T Type II stage 4 years
52E-4013 Specimen stab spring Stage 3 years
NOTE: The Expiration column indicates the approximate lifetime of the part, and not the
guaranteed period.