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3.5 Operation for Image Observation
3 - 58
Fig. 3.5-28 Coordinate System Area
NOTICE: The sample coordinate is not exactly the coordinate of the sample. It is not rotated
with the sample when it is rotated.
3.5.7.2 Movable Range and Specimen Exchange Position
(1) Movable Range and Specimen Exchange Position
The following table shows the movable range and the specimen exchange position.
Mechanical coordinate and specimen coordinates are selectable for X and Y-axes. The
specimen coordinate is (0, 0) at the center of the specimen holder.
Table 3.5-4 Operating Ranges and Specimen Exchange Position (Type II)
Movable Range of
Mechanical Coordinate
Movable Range of
Specimen Coordinate
Exchange Position of
Mechanical (specimen)
Coordinate
X 0 ~ 100 mm －60 ~ ＋40 mm 60 mm (0 mm)
Y 0 ~ 50 mm －25 ~ ＋25 mm 25 mm (0 mm)
R 0~360°(Continuous rotation) 0~360° (Continuous rotation) 0°
T -20 ~ 90° -20 ~ 90° 0°
Z 5.0 ~ 65 mm 5.0 ~ 65 mm 10 mm, 65 mm
The allowable ranges of X, Y, Z and T axes are limited for a large specimen, and when
optional detectors are in position.
Motion of each axis is limited to within the allowable range by computer control. There is
no risk of striking the objective lens if the correct specimen size, height, and detectors being
used are set correctly.
The table below shows movable ranges along the X and Y-axes (in stage coordinates) by
specimen size.