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6.4 CD Measurement Function (Option)
6 - 60
6.4.3.2 Linear Approximation Method
Explained below is the linear approximation algorithm.
Fig. 6.4-5 Linear Approximation Algorithm
Linear approximation
method
Image acquisition
Preparation of profile
[Refer to 6.4.3.2 (2).]
Slope line detection
[Refer to 6.4.3.2 (3).]
Baseline detection
[Refer to 6.4.3.2 (4).]
Length detection
[Refer to 6.4.3.2 (5).]
End
p(n)
s(n)
d(n)
Edge search direction
Max. value d
max
d peek
Threshold level Th
0
Slope line
s (n)
Baseline start poin
t
Baseline area
Edge position
Baseline