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5.1
5 - 1
5. REPLACEMENT PARTS
5.1 Consumables
The items shown in Table 5.1-1 should always be on hand for normal operation.
Table 5.1-1 Consumables
Part No. Part Name Use Remarks
G370009 Conductive paint For protection against chargeup 30 g
50E-6159
Carbon seal Set of 20
G370250 Metal polishing paste 50 g For cleaning parts 50 g
G743002 Stick bamboo For cleaning parts 10 pcs
S370057 Cotton cloth For cleaning parts
S269003 Aluminum foil For cleaning parts
585-4267 Vacuum grease (in tube) For vacuum seal (stationary part)
50E-1138 Objective lens aperture plate (0.03, 0.05, 0.05, 0.12 mm dia.)
50E-1139
Objective fixed aperture 0.35
(made of Mo)
For orifice unit Set of 20
535-1289 Condenser aperture (made of
Mo)
For condenser lens aperture Set of 20
51E-0240
Cartridge Filament
Needs for Cartridge Wehnelt Set of 10
51E-1527 RP oil SMR-100 (ULVAC.Inc.) For oil rotary pump 500 mL
51E-1526 Oil mist trap OMT-200A For oil rotary pump
Acetone
For cleaning
533-1337
Molybdenum board
For baking aperture plate
S263001
Polyethylene gloves
For handling parts
52E-1629
TMP oil reserver
Turbo molecular pump