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1.1 Specifications
1 - 4
Saving image data: Saved image size:
（640 x 480 pixels, 1280 x 960 pixels, 2560 x 1920 pixels,
and 5120 x 3840 pixels）
Applicable format: BMP, TIFF, and JPEG
Image data printout: Free-layout printing feature provided
Management of saved image data: SEM Data Manager (an image database) provided
(image data management, thumb nail display, and various
image processing features)
Other functions: Beam blanking (during image freeze)
Raster rotation
Dynamic focusing/tilt compensation
Data display (image number, acceleration voltage,
magnification factor, micron marker, micron value, WD value,
date, time, vacuum level, and detector)
Data display unit image/reversal switchable
Data entry (graphics (circles, rectangles, arrows, dimensional
lines) character input)
Simple measurement function (displaying size and arrow
between 2 points)
3D animation maintenance guide
Image transfer to the Quartz Imaging PCI
X-ray mode feature: Signal input pins (pins provided on each system)
• X-ray Rate Meter signals (0 to + 10 V)
• Mapping signals (TTL)
Scanning mode
• Line analysis
• Spot analysis
• Selected area analysis
DBC interface (optional)
1.1.7 Safety Equipment
Protection features provided on power failures, electrical leakage, and vacuum failure
1.1.8 Size and Weight
Main unit: 700 (W) x 800 (D)* x 1460 (H) mm, 360 kg
Display unit: 850 (W) x 800 (D) * x 1200 (H) mm, 120 kg
Rotary pump: 526 (W) x 225 (D) x 306 (H) mm, 28 kg
Air compressor: 400 (W) x 230 (D) x 550 (H) mm, 18 kg
Weight: 200 (W) x 180 (D) x 160 (H) mm, 40 kg
* Exclusive of cables and connectors