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3.5.5
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(5) Manual astigmatism correction
Manual astigmatism correction can be done using the knobs on the manual operation panel
or with the mouse operation in the Scanning Image window.
(a) Knob operation
Use Stigma control knobs X and Y on the operation panel.
(b) Mouse Operation
Move the mouse cursor to the top left quadrant of the image, where the mouse cursor is
changed to the STIGMA cursor
. Drag the mouse while holding down the left
button for X or the right button for Y correction. Repeat X and Y corrections, and focus,
for a final result.
Sensitivity of mouse operation can be adjusted on the Mouse Operation tab in the
Optional Setup dialog window.
Astigmatism corrections can be done with the X and Y scroll bars as well.
Checking the Scroll Bar box on the Utility tab in the operation panel enables use of
these scroll bars.
NOTICE: If the image moves while correcting astigmatism, carry out Stigma Alignment.
Refer to <3.4.2 Axial Alignment>.
(c) Dynamic stigma monitor
The dynamic stigma monitor is a mode that changes the amount of stigma correction
according to the image scanning position. Because only the part of the image for which
stigma correction is at optimum is in focus, adjustments are performed so as to bring
the in-focus point to the center of the image. This mode is useful for observing a
specimen that indicates the presence of a structure in the entire image at a high
magnification. If the specimen surface contains few micro-structures or has a skewed
structure, it may be difficult to identify an in-focus position.
Selecting the dynamic stigma monitor from the Operate menu causes the execution of
the dynamic stigma monitor mode. Because this mode works well at a magnification of
5,000x or higher, any low-magnification setting when the mode is selected will
automatically be preset to 5,000x. Any magnification equal to or greater than 5,000x will
remain unchanged.
Running the dynamic stigma monitor displays a circle and a crossbar on the observation
image, as illustrated in the figure below: