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3.5 Operation for Image Observation
3 - 86
(4) Calibration is necessary when accuracy is degraded.
Carry out the following three calibrations when accuracy of eucentricity is degraded.
(a) Rotation center
It measures the deviation of the rotation center from the beam irradiation point.
For this auxiliary operation, use a specimen base (height: 6 mm) on which no specimen
is loaded. Use the Stage tab to set the specimen Height in the SPECIMEN block to
Standard.
1) Insert a specimen, set WD at 10 mm, tilt at 0° and R at 0°, then search for a
structure of interest near the specimen center.
2) Select Stage Calibration - Rotation center command in the Option menu.
The Stage Offset Adjust dialog box will open.
Fig. 3.5-57 Center of Rotation Calibration Dialog Box
3) Click Reset button. The following message indicating steps of operation will be
shown.
Fig. 3.5-58 Verifying the Operating Method
4) Bring the structure of interest to the image center, and click Enter button.
The specimen rotates 45°. After it stops, search for the aforementioned structure
of interest (although it shifts from the image center, it will be located within a range
of about 300 µm). Bring this point to the image center and click Enter button.