Filter
Top Products
6.4.4
6 - 69
6.4.4 Description of Windows Used in Measuring Operation
Following is a description of the windows used in CD measurement.
6.4.4.1 Starting CD Measurement Function
For starting CD measurement on S-3400N GUI, click CD measurement icon
on the tool
button area of the Operation panel or select CD Measurement command in Analysis menu.
To start on SEM Data Manager, click Measure icon
or select CD Measurement command
in Processing menu.
6.4.4.2 Images for Measurement
On the S-3400N GUI, use observing image for CD measurement.
Measurement is carried out in the frozen image. When you start measurement while image is
scanning, scan will stop at the end of the frame and then, measurement cursor will be shown.
Use Full or Small screen mode. Full screen mode results more accurate measurement in such
a condition where error caused by pixel size limitation is dominant.
On the SEM Data Manager, measurement is carried out on an image on the display area.
NOTICE: (1) Use image size of 2560 x 1920 pixels or smaller. Measurement is disabled for
5120 x 3840 pixels images.
(2) In automatic measurement mode, processing time for finding edges depends on
the image size. Larger images need longer processing time.
It is recommended to use 1280 x 960 image size for measurement.
(3) Showing line profiles also needs processing time. For higher throughput, it is
recommended not to show line profiles (uncheck Profile check box).