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6.4 CD Measurement Function (Option)
6 - 102
The following table is an example of measured data saved in csv format and opened with
Microsoft Excel. (Measurement on SEM Data Manager) Where 3 times of width-pitch (left side
width), width-pitch (right side width), 5 times of horizontal and vertical width and 5 times of angle
are measured and then, saved.
Table 6.4-1 The Example of Measured Data
File Commen
t
Mode Multiple Auto/Manua Date Vacc Vdec Deceleratio
n
Mag W.D. Calibration Width(Left Pattern)(u
m
Max(um) Min(um)3Sigma(um)Pitch(Left Line)(u
m
Max(um) Min(um)3Sigma(um
)
W/P
測長hhh.jpg 2 W&P Off Auto 2004/7/9 14:04 1kV 0kV Off x100.0k 2.6mm Calibrated 0.0839 0.0872 0.0796 0.0052 0.2427 0.248 0.2392 0.0077 0.3
測長hhh.jpg 2 W&P Off Auto 2004/7/9 14:04 1kV 0kV Off x100.0k 2.6mm Calibrated 0.0837 0.087 0.0794 0.0052 0.2426 0.2479 0.2391 0.0077 0.3
測長hhh.jpg 2 W&P Off Auto 2004/7/9 14:04 1kV 0kV Off x100.0k 2.6mm Calibrated 0.0816 0.0852 0.0788 0.0046 0.2411 0.244 0.238 0.006 0.3
File Commen
t
Mode Multiple Auto/Manua Date Vacc Vdec Deceleratio
n
Mag W.D. Calibration Width(Right Pattern)(
u
Max(um) Min(um)3Sigma(um)Pitch(Right Line)(u Max(um) Min(um)3Sigma(um
)
W/P
測長hhh.jpg 2 W&P Off Auto 2004/7/9 14:05 1kV 0kV Off x100.0k 2.6mm Calibrated 0.0818 0.0869 0.0792 0.0051 0.2411 0.2444 0.238 0.0046 0.3
測長hhh.jpg 2 W&P Off Auto 2004/7/9 14:05 1kV 0kV Off x100.0k 2.6mm Calibrated 0.0776 0.0811 0.0754 0.004 0.2385 0.2424 0.2364 0.0046 0.3
測長hhh.jpg 2 W&P Off Auto 2004/7/9 14:05 1kV 0kV Off x100.0k 2.6mm Calibrated 0.0795 0.082 0.0762 0.0042 0.2368 0.2407 0.2334 0.0045 0.3
File Commen
t
Mode Multiple Auto/Manua Date Vacc Vdec Deceleratio
n
Mag W.D. Calibration Width(X)(Line)(um) Max(um) Min(um)3Sigma(um)
TV35.tif 2 Standard Off Auto 2004/7/9 14:07 2kV 0kV Off x35.0k 3.0mm Calibrated 0.7958 0.7962 0.7951 0.0024
TV35.tif 2 Standard Off Auto 2004/7/9 14:07 2kV 0kV Off x35.0k 3.0mm Calibrated 0.7924 0.7932 0.7924 0.0016
TV35.tif 2 Standard Off Auto 2004/7/9 14:07 2kV 0kV Off x35.0k 3.0mm Calibrated 0.7879 0.7887 0.7876 0.0024
TV35.tif 2 Standard Off Auto 2004/7/9 14:07 2kV 0kV Off x35.0k 3.0mm Calibrated 0.7827 0.7838 0.7819 0.004
TV35.tif 2 Standard Off Auto 2004/7/9 14:07 2kV 0kV Off x35.0k 3.0mm Calibrated 0.7872 0.7876 0.7864 0.0024
File Commen
t
Mode Multiple Auto/Manua Date Vacc Vdec Deceleratio
n
Mag W.D. Calibration Width(Y)(Line)(um) Max(um) Min(um)3Sigma(um)
TV35R.bmp 2 Standard Off Auto 2004/7/9 14:07 2kV 0kV Off x35.0k 3.0mm Calibrated 0.5749 0.5749 0.5749 0
TV35R.bmp 2 Standard Off Auto 2004/7/9 14:07 2kV 0kV Off x35.0k 3.0mm Calibrated 0.5749 0.5757 0.5746 0.0023
TV35R.bmp 2 Standard Off Auto 2004/7/9 14:07 2kV 0kV Off x35.0k 3.0mm Calibrated 0.5678 0.5685 0.5668 0.0035
TV35R.bmp 2 Standard Off Auto 2004/7/9 14:07 2kV 0kV Off x35.0k 3.0mm Calibrated 0.5806 0.5808 0.5806 0.0004
TV35R.bmp 2 Standard Off Auto 2004/7/9 14:08 2kV 0kV Off x35.0k 3.0mm Calibrated 0.581 0.5812 0.581 0.0004
File Commen
t
Mode Multiple Auto/Manua Date Vacc Vdec Deceleratio
n
Mag W.D. Calibration T(deg)
0TR02.BMP 2 Standard Off Manual 2004/7/9 14:09 20kV 0kV Off x120 29.9m
m
UnCalibrate
d
89.26
0TR02.BMP 2 Standard Off Manual 2004/7/9 14:09 20kV 0kV Off x120 29.9m
m
UnCalibrate
d
88.41
0TR02.BMP 2 Standard Off Manual 2004/7/9 14:09 20kV 0kV Off x120 29.9m
m
UnCalibrate
d
86.98
0TR02.BMP 2 Standard Off Manual 2004/7/9 14:09 20kV 0kV Off x120 29.9m
m
UnCalibrate
d
90.38
0TR02.BMP 2 Standard Off Manual 2004/7/9 14:09 20kV 0kV Off x120 29.9m
m
UnCalibrate
d
89.47
In case of measurement on SEM, "File" is not put in saved data.
Note that the comment shall be written before carrying out measurement. The comment is
stored together with measured data when a measurement is performed.