Filter
Top Products
6.3 Specification of S-3400N External Communication (Option)
6 - 26
6.3.2.8 Stage
(1) Stage information
Property
Chamber type reading
ChamberType as Long Read Only
0: Standard specimen chamber
Comment: Currently there is only standard specimen
chamber, but maybe other type chamber will
add in future.
Stage type reading
StageType as Long Read Only
0: manual stage
1: 5 axes motor drive stage
(2) Monitoring /setting of stage position
Method
5 axis position monitoring
GetStagePosition (Byref X as Long, Byref Y as Long, Byref Z as Long,
Byref T as Long, Byref R as Long) as Long
X 0 to 100000000 : (nm) 100 nm Step
Y 0 to 50000000 : (nm) 100 nm Step
Z 5000000 to 70000000 : (nm) 100000 nm Step
T -20000 to 90000 : x1000 (deg) 0.1 deg Step
R 0 to 359900 : x1000 (deg) 0.1 deg Step
Return 0: Normal receiving
Excluding 0: Abnormal receiving
Comment: Read current position of X, Y, Z, T, R.