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2.1 Control Knobs and Switches on Main Unit
2 - 6
2.1.5 EVAC Panel
Figure 2.1-5 shows the EVAC panel.
Fig. 2.1-5 EVAC Panel
• Key switch: The POWER for the system unit. Insert the key and turn it to the START
position to start the system. Releasing the key stops the key at the ON
position. Returning the key to the OFF position shuts down the system in
a few seconds.
• EVAC switch/light: This switch introduces air into the specimen chamber. The built-in light
comes on when the specimen chamber is at atmospheric pressure.
When the air is being introduced, the light blinks. When held down for
0.5 second or longer, this switch acts as an AIR switch/light.
• N-MODE light: This light comes on when the VP-SEM mode is selected.
See <2.3.7.3 VACUUM MODE Window>.
• PUMP light: This light, which indicates the operating status of the turbo molecular
pump (TMP), blinks when the TMP is accelerating, and remains solidly lit
when the pump is running at a steady state.
N-MODE Light
AIR Switch/light
PUMP Light
Key Switch
EVAC Switch/light