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6.4 CD Measurement Function (Option)
6 - 90
In case of measurement on the SEM Data Manager, a new image can be displayed by
clicking a thumbnail.
When new image file is opened during multi point calibration, recording condition will
be compared with that of previous measured image.
If recording condition of old and new images do not match, a warning message will be
shown.
You can continue measurement including data of old image, or start measurement
newly clearing old data. Checked condition is
[must be equal] : Accelerating voltage / Magnification / Probe current / Vacuum /
scanning speed / detector
[must be nearly equal] : Working distance (within + - 5%)
Calibration factor and used measured data can be saved.
When "Apply" button is clicked, a message Save calibration data ? will be shown.
You can save calibration factor, used measured data and statistical data as text or csv
file format.
NOTICE: In the CD measurement function on the SEM data manager, calibration using images
obtained with other models (S-3000N, S-4800 or others) is not effective.