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6.4 CD Measurement Function (Option)
6 - 68
Fig. 6.4-9 Measured Dimension vs Measurement Error
(theoretical) at Various Magnifications
Magnification: 150 k×
Magnification: 50 k×
Magnification: 20 k×
20
15
10
5
0
0.01
0.1
1
10
Measurement erro
r
(%)
Measured dimension [µm]