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3.5 Operation for Image Observation
3 - 60
IMPORTANT: The Exchange Z10 [HOME Z10] button moves the Z-axis of the specimen stage
to the 10 mm mark. Therefore, if the Exchange Z10 [HOME Z10] button is
pressed when a tall specimen not suitable for the Z-axis 10 mm mark is mounted,
the specimen will touch the BSE located on the underside of the objective lens,
damaging both the BSE and specimen. To avoid this problem, the specimen
should be exchanged using the Exchange Z 65 [HOME Z65] button.
3.5.7.3 Setting Specimen Size and Detectors in Use
The specimen size, height and operating position of an optional detector in the specimen
chamber must be set correctly to keep the movement of each axis within the allowable range.
Use the following procedure for the setting.
(1) On the Stage tab on the Operation Panel, verify the display of the SPECIMEN box, which
shows the specimen size and height. On Size, specify the size of the specimen to be
imaged. On Height, select the highest point of the loaded specimen as measured using the
height gauge.
See 3.2.4.2 Measuring and Setting the Specimen Height.
For example, if the highest point on the loaded specimen matches the Standard mark on the
height gauge, the Standard setting should be selected. On each detector, the display
window is appears in orange if the detector is inserted to the position where it is used. If the
content of the display does not match the specimen to be observed, click the Set button.
Fig. 3.5-30 SPECIMEN Box
The specimen size and height can be set only at the exchange position.
If the Set button is disabled (grayed out), click the Exchange Z10 [HOME Z10] (or Exchange
Z65 [HOME Z65]) button on the right side of the Control Panel, and set a specimen size
after the display window on the left of the button has turned blue.
See 3.5.7.2 Movable Range and Specimen Exchange Position.