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3.5 Operation for Image Observation
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3.5.7.6 Z and Tilt Axis Operation
(1) Operation using the Z/TILT box of the Stage tab on the Operation Panel (coordinates
specifications)
When moving Z and Tilt axis by specifying a set of coordinates, use the Z and Tilt scrollbars
to specify coordinates, and then click the GO button. Z and Tilt axis coordinates can be set
by input from the keyboard and then press ENTER key.
(2) Operation using the Z/TILT box of the Stage tab on the Operation Panel (continuous
motion)
It is possible to move the Z-axis continuously by holding down on the Continuous Move
button
.
The speed of motion can be specified in four steps using the Speed slider.
Similar operations can also be performed using the mouse on the screen, to be described
later.
(3) Moving to an analysis position.
By clicking the Analysis button, it is possible to move to the analysis position of WD=10 mm.
(4) Mouse operation on the scanning image
It is advisable to use mouse operation on the scanning image for continuous operation of Z
or Tilt axis.
For further details, see 3.5.7.7 Mouse Operation of Stage on the Scanning Image.
IMPORTANT: Incorrect specimen size, height, and detector settings can damage the objective
lens or the semiconductor BSE located on the underside of the objective lens, as
well as the specimen itself.
IMPORTANT: To avoid inadvertently disabling the !Stop button, the GO button should not be
pressed continuously when the stage is in motion.