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APPENDIX - 9
Code Message Text Explanation and Countermeasure
*7304 Evacuation system is not
working.
Check power switch.
The system fails to start due to an evacuation system error.
Shut down the PC, turn off the Main switch, wait 30
minutes, and then restart the system. If turning off the
Main switch does not shut off the power, turn off the Main
breaker in the back of the system, and restart the system
after the power is completely shut off. If the problem
persists, call a service engineer.
7310 Abnormality in the EVAC system
control power supply was
detected.
Shut down the PC , turn the
[MAIN] switch off and contact a
service engineer.
Moreover, after abnormality is
detected, the main power supply
will be turned off in about ten
minutes automatically.
According to the message, call a service engineer.
7311 The vacuum exhaust was not
normally done or the vacuum
leakage is occurred.
Confirm whether the specimen
stage and the specimen chamber
have stuck or the thing doesn't
narrow. And confirm the vacuum
leaks in the specimen chamber
installation part of various
detectors, then push the [EVAC]
switch.
When it occur again, contact a
service engineer.
7312 The EVAC system vacuum valve
doesn't work normally.
Shut down the PC , turn the
[MAIN] switch off and contact a
service engineer.
7313 The rotary pump doesn't work.
Shut down the PC , turn the
[MAIN] switch off and contact a
service engineer.
Moreover, after abnormality is
detected, the main power supply
will be turned off in about ten
minutes automatically.
This message appears if the evacuation of the specimen
chamber fails within a specified length of time. Follow the
tips given in the message.
According to the message, call a service engineer.
7314 Abnormality of the Pirani vacuum
gauge was detected.
Start again after the [MAIN]
switch is turned off after PC is
shutted down, and the system
stops completely. When this
message is shown again, contact
a service engineer.