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3.4.2
3 - 23
3.4.2.2 Axial Alignment Items in Detail
(1) Preliminary checks before performing an axial alignment
Before commencing an axial alignment, the following preliminary steps should be performed:
(a) Place a specimen in the specimen chamber.
See 3.2 Mounting Specimen.
(b) Set the accelerating voltage to 5.0kV.
(c) Set Probe Current on the electron optical system SETUP tab to 80.
(d) Set the objective lens movable aperture to the "0" position (open aperture).
(e) Set the WD to 10 mm; focus the specimen.
(f) Using the Align
button on the Control Panel, start the [Alignment] window. On
this window, click the [Reset All] button.
(2) Beam Alignment
Beam Alignment is required so that the electron beam passes through the center of the
objective lens aperture. This alignment is performed in terms of Beam Align Tilt and
Beam Align Shift.
Fig. 3.4-5 Selecting the Beam Alignment
(A) Basic axial alignment method that can be performed while viewing an image
• Click the Beam Align Shift button. If an image fails to appear, adjust the contrast
and the brightness of the image.
• On the Manual Operation Knobset, either adjust the STIGMA/ALIGNMENT knob or
move the mouse while holding down on the left mouse button in the Alignment
Operation area on the Alignment window, and adjust the screen crosshairs to
maximize the brightness of the observed image.
• Similarly, click the Beam Align Tilt button, and adjust the screen crosshairs to
maximize the brightness of the observed image.