Hitachi S-3400N Microscope & Magnifier User Manual


 
6.4 CD Measurement Function (Option)
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(1) Entry No. combo Box
Select a registration No. for measurement conditions. A maximum of 16 measurement
conditions can be registered. An asterisk (*) appears at the right of an already registered
No.
(2) Lock Check Box
Put a check here to inhibit change of the conditions.
(3) Caption Box
Enter a caption for the registered No. Entry can be made in a maximum of 16 half-size
characters.
(4) Type
Select a measurement type.
(a) Standard button
Select Standard for a single dimension measurement in X or Y direction or angle.
(b) W&P button
Select this button for simultaneous width and pitch measurement.
(c) Multiple check box
Click this for setting successive measurements. This is usable when Standard has
been selected.
(d) Profile check box
Click this for displaying a line profile. This is settable when measurement mode is
Auto.
(5) Mode Selection
Select the measurement mode.
(a) Auto button
Selects auto measurement.
(b) Manual button
Selects manual measurement.
(6) Measurement Direction
Select a measurement direction.
(a) X button
Selects measurement in X (horizontal) direction.
(b) Y button
Selects measurement in Y (vertical) direction.