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2.1.2
2 - 3
2.1.2 Electron Optical Column
Figure 2.1-2 sketches the sectional view of the S-3400N column.
Fig. 2.1-2 Sectional View of S-3400N Column
Electron Gun
1st Condenser Lens
2nd Condenser Lens
Objective Lens Movable Aperture
Objective Lens
Specimen
Chamber
Specimen
Specimen Stab
Specimen Stage
Beam Alignment coils
Deflection Coil
SE Detecto
r
BSE Detector
Pre-centered cartridge type
Tungsten hairpin filament