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6.4.4
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(4) Set Button
Displays a measurement cursor for calibration in accordance with the measurement
parameters.
For calibration using manual mode, align the measurement cursor in both X, Y directions
with a position of known dimensions on the screen. For calibration in auto mode, adjust
so that the cursor box encloses the edges of the pattern under measurement.
(5) Measure button
Measures the distance specified by the measurement cursors.
(6) Multiple measurement setting
Use for measuring and averaging multiple points for the measured data.
(a) Multi checkbox
When the box has been checked, multiple measured data are averaged and indicated
in the Average box by each measurement. The number of measurement is shown in
the right side box.
If it is not checked, only the latest measured data is used.
(b) Cancel and Reset buttons
Cancel deletes the latest measured data, and Clear deletes all measured data.
(c) Reject Max Min check box
When the box has been checked, maximum and minimum data are rejected for
averaging calculation. Maximum and minimum data are rejected when number of
measurement is 5 times or more.
(7) Correct Value Box
Enter a calibration value.
(8) Calibrate X/Y Button
Calculates a calibration coefficient.
(9) Calibration Factor Box
Displays the calculated calibration factor.
The calibration factor "C" is calculated by the following equation:
C = Correct Value / Measured Value (6.4.8)
(10) Apply Button
Registers the calibration result.
(11) Delete Button
Deletes the registration of calibration result.