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2.3.9
2 - 53
2.3.9.1 Optics Tab
The Optics tab is for setting operating condition of the electron optical column.
(1) ELECTRON BEAM Window
Sets electron optical system conditions.
Fig. 2.3-40 Setup Window – Optics Tab
(a) Vacc
Sets and accelerating voltage. This function is equivalent to the ELECTRON BEAM
window on the Operation Panel.
(b) Emission Current
Indicates the present emission current.
(c) Filament
Changes the filament current and adjusts the temperature to which the filament is to be
heated. The filament current should be adjusted to a point slightly below the saturation
point for the emission current.
The Auto Filament Saturation (AFS) function automatically sets an appropriate filament
current. AFS can be run in three modes, low, medium, and high, and can be used for
the following purposes: