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3.3.1
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3.3 Applying the Accelerating Voltage
3.3.1 Conditions under which Accelerating Voltage can be Applied
If Electron Beam box at the left top position on the Control Panel is grayed out, the
accelerating voltage can not applied, wait until the ON button is activated with the evacuation
of the camber is completed.
When the accelerating voltage is on, the accelerating voltage indicator shows the currently set
accelerating voltage and the emission current (in µA). The top left button should indicate OFF.
Fig. 3.3-1 Electron Beam block (ON active)
3.3.2 Setting the Accelerating Voltage and Filament Current
There are four ways of applying an accelerating voltage:
(a) Clicking Electron Beam box, opening SETUP, and press ON in OPTICS.
Fig. 3.3-2 Applying the Accelerating Voltage (a)
(b) Pressing the left ON button in Electron Beam box.
Fig. 3.3-3 Applying the Accelerating Voltage (b)