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The following tables show alarm or error message and how to recover from the error.
Errors with (*) mark are caused by failure on equipment.
[Alarm for operation]
Message
No.
description recovering operation
E10
(+ buzzer)
Specimen exchange rod is not at
proper position when the GV is to
be closed.
Pull out the rod fully
E11
(+ buzzer)
Specimen exchange chamber is
not closed when the chamber
is to be evacuated.
Close the chamber.
E12
(+ buzzer)
Cooling water flow is les than
specified limit value.
Adjust water flow. Proper range of flow is
0.9 to 2L / min.
E13
(no buzzer)
Cooling water flow is over the
specified limit value.
Adjust water flow. Proper range of flow is
0.9 to 2L / min.
[Alarm to be recovered by proper operation]
E14
(+ buzzer)
Air pressure for driving valves is
lower than its limit value.
Evacuation sequence stops.
When using air compressor, check the
valve at the air output.
When using utility air, check the air
supply.
Evacuation sequence will recover when
the air supply becomes normal
pressure.
If the alarm can not be recovered,
contact to service engineer.
E15
(+ buzzer)
Aperture heater current is off
while the APT HEATER switch is
at AUTO or DEGAS.
Check that the cable for the heater (BNC
type connected to the objective lend
aperture from its down side.
If the alarm can not be recovered, turn
APT HEATER switch to OFF to stop
the alarm.
Contact to service engineer because
operation without heating the aperture
will cause contamination on the
aperture plate.
E08(+
buzzer)
TMP failure
E09(+
buzzer)
TMP back pressure is too high.
Turn the EVAC POWER switch to off.
After “POFF” is indicated, turn the
switch to on.
If the error message appear again
contact to service engineer.