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PRECAUTION - 8
SPECIFICATION
Specifications for Hitachi Model S-4800, Field Emission Scanning Electron Microscope
1. Resolution:
Accelerating voltage 15 kV
Working distance = 4 mm ..............................1.0 nm
Accelerating voltage 1 kV
Working distance = 1.5 mm ...........................2.0 nm
2. Magnification:
High magnification mode ............................... 100× to 800,000×
Low magnification mode ................................ 30× to 2,000×
3. Electron Optics:
(1) Electron gun .......................................... Cold cathode field emission type
(2) Extracting voltage (Vext) .......................0 to 6.5 kV
(3) Accelerating voltage (Vacc)...................0.5 to 30 kV (in 100 V steps)
(4) Lens.......................................................3-stage electromagnetic lens, reduction type
(5) Objective lens aperture.......................... Movable aperture (4 openings selectable/
alignable outside column).
Self-cleaning thin aperture
(6) Astigmatism correction coil
(stigmator) ............................................. Electromagnetic type
(7) Scanning coil .........................................2-stage electromagnetic-deflection type