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PRECAUTION - 12
(4) Floor vibration
S-4800 Type I
S-4800 Type II
The allowable amplitude corresponds to an image deviation of less than 0.2 mm on a
micrograph at magnification 220,000×
(5) Acoustic noise .................. The following table shows the relation between allowable noise
level (C characteristic) and frequency at the S-4800 installation
site. The allowable amplitude corresponds to an image
deviation of less than 0.2 mm on a micrograph at magnification
220,000×.
Oscillation
Frequency
(Hz)
Allowable Amplitude (X, Y)
(µm Peak to Peak)
1.0 Less than 7.0
1.4 Less than 2.0
2.0 Less than 2.0
3.0 Less than 4.0
4.0 Less than 4.5
5.0 Less than 4.5
6.0 Less than 4.0
10.0 Less than 3.0
Oscillation
Frequency
(Hz)
Allowable Amplitude (Z)
(µm Peak to Peak)
1.0 Less than 25.0
2.0 Less than 14.0
3.0 Less than 5.0
3.5 Less than 2.9
4.0 Less than 1.8
5.0 Less than 1.0
6.0 Less than 1.1
10.0 Less than 1.2
Oscillation
Frequency
(Hz)
Allowable Amplitude (X, Y)
(µm Peak to Peak)
1.0 Less than 8.0
1.5 Less than 3.0
2.0 Less than 1.4
2.4 Less than 1.4
3.0 Less than 3.0
5.0 Less than 4.0
6.0 Less than 3.5
10.0 Less than 3.5
Oscillation
Frequency
(Hz)
Allowable Amplitude (Z)
(µm Peak to Peak)
1.0 Less than 20.0
2.0 Less than 10.0
3.0 Less than 5.0
4.0 Less than 2.7
5.0 Less than 1.8
6.0 Less than 1.0
7.0 Less than 1.0
10.0 Less than 1.0
Frequency : f (Hz)
Allowable Noise Level Type I Allowable Noise Level (Type II
150
75 dB or less 72 dB or less
150 800
60 dB or less 60 dB or less
800 2000
54 dB or less 52 dB or less