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3.11 Mechanical Column Alignment
For normal operation, mechanical alignment of the electron gun and condenser lens is not
necessary.
If, however, an electromagnetic alignment is not sufficient, proceed with a mechanical alignment
using the following process:
NOTICE
Before performing mechanical alignment, wait for more than two hours after starting the
heating of the objective lens aperture. If mechanical alignment is made immediately after the
start of heating the objective lens aperture, the alignment condition will be affected by thermal
expansion of the objective lens aperture.
3.11.1 Preparative Operation for Alignment
Before proceeding with a mechanical alignment, make the following arrangements.
(1) Set the specimen into the specimen chamber.
(2) Set accelerating voltage to 1.0 kV.
(3) Open the Column Tab in the Setup dialog. Then select Normal probe current mode and
UHR Focus mode.
(4) Set the Cond Lens 1 and Cond Lens 2 checkboxes to OFF in the Column Tab.
1. Preparative operation for Alignment
2. Mechanical alignment of the electron gun
3. Alignment of the beam monitor aperture
4. Alignment of the objective lens aperture
5. Mechanical alignment of the first condenser lens
6. Mechanical alignment of the second condenser lens
7. Stigma alignment (electro-magnetic alignment)
8. Aperture alignment (electro-magnetic alignment)