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PRECAUTION - 10
(6) Signal processing modes ....................Automatic brightness control,
Gamma control,
Automatic focus,
Automatic stigmator
(7) Automatic data display ........................Image number, accelerating voltage, magnification,
micron bar, micron value, date/time and working
distance can be printed on the film.
(8) Data entry ............................................Alphanumeric characters, numbers, and marks can
be written on the image from the keyboard.
(9) Electrical image shift............................±12 µm (WD = 8 mm)
6. Evacuation System
(1) System type.........................................Fully automatic pneumatic-valve system
(2) Ultimate vacuum levels........................Specimen chamber : 7 × 10
-4
Pa
Electron gun chamber :
IP-1 1 × 10
-7
Pa or better
IP-2 2 × 10
-6
Pa or better
IP-3 7 × 10
-5
Pa or better
(3) Vacuum pumps....................................Electron optical system : 3 ion pumps
Specimen chamber : Turbo molecular pump
1 oil rotary pump should be provided by user.
(4) Compressor .........................................Oil-less type compressor should be provided by user.
7. Protection Devices
Warning devices ..........................................Power failure, Cooling-water interruption, Inadequate
vacuum