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3.5.6 Operation of the Specimen Stage (Type I - Manual Stage)
The S-4800 type I SEM provides a 5-axis manual stage.
3.5.6.1 Movable range and specimen exchange position
The following table shows movable range and specimen exchange position.
Movable Range Exchange position
X 0 to 50 mm 25.0 mm
Y 0 to 50 mm 25.0 mm
R 0 to 360° 0°
T -5 to 70° 0°
Z 1.5 to 30 mm 8.0 mm
3.5.6.2 Movable range limitation of X, Y and R axes
(1) When no optional detector is in its operation position, no limitation for a specimen smaller
then 5 inches diameter.
For 6 inches diameter, 100mm square and 125mm square, X axis range has no limitation and
Y axis range is limited as
6mm Y 50mm.
(2) When the YAG type BSE detector has been inserted to its operating position, limit X axis
range as follows.
smaller than 4 inches diameter : no limitation
5 inches diameter : 2mm X 50mm
6 inches diameter : 15mm X 50mm
100mm square : 15mm X 50mm
125mm square : 15mm X 50mm
(3) For 125mm square specimen, Use rotation angle of 0,90,180 and 270 deg. only.
And rotate R axis only at X=Y=25mm (center position). If rotate specimen at other X,Y
position, specimen may hit the detector.