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General Characteristic of signals utilized in S-4800
Signal Characteristics Applications
SE signal
High resolution surface information
Voltage contrast
High edge contrast
Sensitive to specimen charging
Useful for ultra high resolution
topmost surface observation of light
materials like carbon
BSE-L
signal
Sensitive to compositional
information
information of depth of specimen
Less sensitive to specimen charging
Less edge contrast
Useful for microscopy of a wide range
of materials, specifically for
suppressing edge contrast, enhanced
compositional information, reducing
specimen charging artifact.
BSE-H
signal
Sensitive to compositional
information
information of depth of specimen
Less sensitive to specimen charging
Less edge contrast
Signal amount varies with materials
Useful for microscopy of enhanced
compositional contrast or inner
structures. Low signal amount may
limit applications for some materials
3.5.1.2 Signal Control
When Mix or Upper has been selected, the ratio of SE, BSE-L and BSE-H signals included in the
upper detector output is controllable with the Signal control tools.
When SE is selected,
When +BSE is selected, amount of BSE signal is controlled by BSE ratio selection box.
Select a ratio from the pull down list clicking the arrow button. Low angle BSE will be detected
with L.A0 to L.A100. With larger number, amount of SE is suppressed and results BSE richer
image. H.A results high angle BSE image.
(1) SE Signal Detection
When the SE button is selected, the upper detector signal will be of pure SE
Although BSE is detected with the upper detector, amount of SE signal is significantly greater.
Signal control tools
BSE ratio selection box