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1-9
1.2 Materials or Instruments to be prepared by User
See Table 1-4.
Table 1-4 Materials or Instruments to be Prepared by User
Name Quantity Remarks
Ethanol 500 mL Used for cleaning parts.
Acetone 500 mL Used for cleaning parts.
Liquid nitrogen 2 L/day For cooling the anti-contamination trap.
Vacuum evaporator 1 set Used to evaporate carbon onto specimen or bake out
aperture plate.
Magnetron spattering coater 1 set Used to coat metal onto specimen, or for coating metal
onto aperture plate.
Ultrasonic cleaner 1 set Used for cleaning parts.
Desiccator or the like 1 set For storing delicate parts.
Optical microscope 1 unit For checking specimen and aperture
1.3 Wiring
Only the persons who have been trained by a certified engineer of the manufacturer are allowed
to carry out the maintenance work described below.
Only cautions with respect to wiring are described here.