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As described in the message, bring the structure of interest to the image center at a
magnification of about 500×, then click Enter button of Tilt 0 deg.
(d) Bring the stage to a tilt angle of 30°. Again bring the structure of interest to the image
center, and click Enter button of Tilt 30 deg. A Calibration Factor is calculated and
indicated. This value represents the deviation of specimen height from the reference
position. Now click the Apply button.
Click the Close button to close the window.
(4) Calibration necessary when accuracy degraded
Carry out following three calibrations when accuracy of eucentricity was degraded.
(4-1) Rotation center
It measures the deviation of the rotation center from the beam irradiation point.
(a) Insert a specimen, set WD at 12 mm or more, tilt at 0° and R at 0°, then search for a
structure of interest near the specimen center.
(b) Select Stage Calibration – Rotation center command in the Option menu.
The Rotation Center dialog window will open.
(c) Click Reset button. The following message indicating steps of operation will be shown.
[Move a remarkable object to the center of image and click Enter button. After stage
rotated 45 deg, move the object to the center of image. Repeat for each 45 deg rotation.
After clicking Enter button for 315 deg, click Apply button and close the dialog.]
(d) Bring the structure of interest to the image center, and click Enter button.
The specimen rotates 45°. After it stops, search for the aforementioned structure of
interest (although it shifts from the image center, it will be located within a range of about
300 µm). Bring this point to the image center and click Enter button.