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Table of Contents (Cont’d)
2. FUNCTIONS .................................................................................................................. 2-1
2.1 Control Knobs and Switches on Main Unit ........................................................... 2-2
2.1.1 Main unit (column) .................................................................................. 2-2
2.2 Control Knobs and Switches on Display Unit.......................................................... 2-13
2.2.1 Display .................................................................................................... 2-13
2.3 Graphical User Interface (GUI) ............................................................................. 2-16
2.3.1 Starting the PC and Logging in the S-4800 Program ............................. 2-16
2.3.2 S-4800 SEM Main Window..................................................................... 2-18
2.3.3 Control arrangement on the window....................................................... 2-19
2.3.4 Menu....................................................................................................... 2-21
2.3.5 Control Panel .......................................................................................... 2-26
2.3.6 Operation Panel...................................................................................... 2-33
2.3.7 Mouse operation on the scanning image................................................ 2-42
2.3.8 Setup dialog window............................................................................... 2-44
2.3.9 Captured Image Window ........................................................................ 2-51
2.3.10 SEM Data Manager Window .................................................................. 2-52
2.3.11 Alignment Dialog Window....................................................................... 2-52
2.3.12 CD Measurement dialog window (option)............................................... 2-53
2.3.13 Comm Port Setting Dialog Window ........................................................ 2-53
2.3.14 Login Setting Dialog Window.................................................................. 2-53
2.3.15 Oblique Dialog Window .......................................................................... 2-54
2.3.16 Password Setting Dialog Window........................................................... 2-54
2.3.17 Save Image Dialog Window.................................................................... 2-55
2.3.18 Opt Signal Processing Dialog Window ................................................... 2-55
2.3.19 Split/Dual Mag Controller........................................................................ 2-55
2.3.20 Using Short-Cut Keys ............................................................................. 2-56
3. OPERATION.................................................................................................................. 3-1
3.1 Preliminary Operation........................................................................................... 3-3
3.1.1 Check of Column Vacuum ...................................................................... 3-3
3.1.2 Flow the cooling water ............................................................................ 3-4
3.1.3 Starting the Display................................................................................. 3-5
3.1.4 Use of Anti-Contamination Trap ............................................................. 3-6
3.2 Specimen Setting and Specimen Exchange......................................................... 3-7
3.2.1 Cautions on Specimen Preparation ........................................................ 3-7
3.2.2 Specimen Preparation for Materials ....................................................... 3-7
3.2.3 Adjustment of Specimen Height ............................................................. 3-8
3.2.4 Specimen Exchange Position ................................................................. 3-8
3.2.5 How to Set Specimen ............................................................................. 3-9