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5.1.2 Replacement Parts
The items below should be prepared in the necessary quantities.
Table 5-2 Replacement Parts
Part No. Part Name Use Expiration
J386012 Photo multiplier R268 Secondary electron detector 5 years
580-4289 FE tip Electron gun 2 years
539-1561
Pulse motor(X,Y) Type2 stage 4 years
539-1562
Pulse motor(T,Z) Type2 stage 4 years
539-1563
Mini motor R Type2 stage 2 years
539-1564
Encoder R Type2 stage 3 years
533-0286 Scintillator For lower detector 3 years
589-3565 Scintillator For upper detector 3 years
RP oil (SMR-100) For rotary pump (1 L) 0.5 years
589-8652 Oil mist trap RP 0.5 years
K433004 Pirani gauge bulb Evacuation system 3 years
Rubber tube for evacuation Evacuation system 5 years
Air tube Evacuation system 3 years
Vinyl hose for cooling water Objective lens cooling 5 years
PC monitor PC 5 years
Hard disk PC 3 years
Keyboard PC 3 years
Mouse PC 2 years
Battery for PC PC 2 years
K429012
Rotary encoder Manual operation panel (Mag.) 3 years
K429013
Rotary encoder Manual operation panel (others) 5 years
NOTE : The Expiration column indicates the approximate lifetime of the part, and not the guaranteed
period.