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For detailed condition setting, lick the Setup button on the above OPE CONDITION block. The
Column tab of the Setup dialog window will open.
(Alternately the Column command in the Setup menu or the Setup button on the tool button area
of the Operation panel are available.)
(1) Selection of Probe Current mode, Focus mode, and Working distance are same as operation
on the Operation panel.
(2) Cond Lens1 (1st Condenser Lens)
It is possible to adjust the probe current by setting Condenser Lens 1. Select a number from
the pull-down menu, click on the up and down button (0.1 step), or key in a number (1.0 to
16.0) followed by the Return key. Probe current increases if a small number is set. If you
uncheck the box, the Condenser lens 1 will turn off. This condition is used only for a
mechanical alignment. For normal operation, check this box.
(3) Cond Lens2 (2nd Condenser Lens)
Condenser lens 2 can only be turned ON or OFF.
Normally, it is set to ON. Select OFF only for mechanical alignment of electron optical axis.
(4) Focus Depth
It is possible to change depth of focus by setting a value. It changes the beam convergence
angle. The best resolution will be attainable with the value 1.0. Depth of focus will increase
with large number. Note that the resolution will degrade if a value except for 1.0 is set
because the beam convergence angle is an important parameter for the optimum resolution
condition. Therefore set it to 1.0 for normal operation. In order to change the depth of focus,