Filter
Top Products
4-4
(7) After completion of heating, wait for 10 to 15 minutes and introduce air into the vacuum
evaporator. Then remove the aperture plate with tweezers.
NOTICE: Do not touch to aperture plate directly by hand.
(8) To further improve image quality at low accelerating voltages, coat both sides of the aperture
plate with platinum-palladium (Pt-Pd) or gold- palladium (Au-Pd) to a thickness of 10 to 20 nm
using an ion coater after heating the aperture plate.
Aperture plate
Molybdenum board
(533-1337)
Fig. 4-2 Baking of Aperture Plate