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3.2.3 Adjustment of Specimen Height
Put the specimen stub on the specimen holder and adjust it to the proper height using the
specimen height gauge as shown in the figure. To adjust, loosen the lock screw and adjust the
specimen height so that the highest point of the specimen is the same as the bottom of the height
gauge. Then, tighten lock screw.
3.2.4 Specimen Exchange Position
(1) Type 1 (Manual stage):
Confirm that the Stage Lock is free (the lamp of Stage Lock switch is off).
Then set the X, Y, R, T and Z knobs of the specimen stage to the specimen exchange position.
Specimen exchange positions: X: 25.0 mm Y: 25.0 mm
R: 0 T: 0 Z: 8.0mm
CAUTION
Specimen height must be adjusted carefully. It must not be 0.5mm higher than the bottom of
the height gauge. If it is higher than this, the specimen may strike the objective lens and
cause damage when operating at a short working distance or at a high tilt angle. Also,
accurate setting of specimen height minimizes image shift during specimen tilting.
stub
specimen
lock screw
height gauge
Y
R
Z
X
T
stage lock