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3. OPERATION
Shown below is the procedural flow of typical SEM operation. For details, refer to each
subsection.
3.1 Preliminary Operation
• Check of Column Vacuum..................................(3.1.1)
• Starting the Display.............................................(3.1.2)
• Use of Anti-Contamination Trap and Cold Trap .(3.1.3)
3.2 Specimen Setting
• Cautions on Specimen Preparation....................(3.2.1)
• Specimen Preparation for Materials ...................(3.2.2)
• Adjustment Specimen Height .............................(3.2.3)
• Specimen Exchange Position .............................(3.2.4)
• How to Set Specimen .........................................(3.2.5)
3.3 Application of High Voltage
• Flashing ..............................................................(3.3.2)
• Setting of Accelerating Voltage and
Emission Current ................................................(3.3.3)
• Application of High voltage .................................(3.3.4)
3.4 Optimizing the Electron Beam
• Selecting Electron Optical Column Condition.....(3.4.1)
• Column Alignment Operation..............................(3.4.2)
3.5 Operation for Image Observation
• Selecting Magnification.......................................(3.5.1)
• Selecting Scanning Speed..................................(3.5.2)
• Image Brightness and Contrast Adjustment.......(3.5.3)
• Focus and Astigmatism Correction.....................(3.5.4)
• Operation of the Specimen Stage Type 1 ..........(3.5.5)
• Operation of the Specimen Stage Type 2 ..........(3.5.6)
3.6 Saving and Recording Images
3.7 SEM Data Manager
• Precaution about SEM Data Manager................(3.7.1)
• Registering Images
on SEM Data Manager Database.......................(3.7.2)
• Using SEM Data Manager ..................................(3.7.3)
• Saving and Recording Images ...........................(3.6.1)
• Setting Conditions for Image Capturing..............(3.6.2)
• Image Capturing .................................................(3.6.3)
• Saving an Image Displayed
in the Scanning Image Screen (Direct Save) .....(3.6.4)
• Saving Captured Images ....................................(3.6.5)
• Taking Photographs............................................(3.6.6)