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4-8
4.3 Maintenance of Air Compressor Only for P/N 539-9010 and 539-9060
NOTICE
Instruments shipped to Europe area where CE marking conformity is necessary do not provide
with the air compressor. Also instruments those shall be compliant to SEMI-S2 guideline do not
provide with the air compressor even when shipped to outside of Europe area.
4.3.1 Checkup and Maintenance
Check the following items regularly.
Before checkup/maintenance, be sure turn the main switch off.
Service Cycle
Check Item Procedure
Every
day
Every
250 h
(1 month)
Every 3,000 h
(1 year)
Every 6,000 h
(2 years)
Discharge of drain Loosen the drain
cock of air tank to
discharge drain.
○
Activation of control
devices (pressure
gauge, pressure switch
and safety valve)
Check the
working pressure
and activated
function.
○
Abnormal vibration and
abnormal sound
○ ○
Loose bolts, nuts and
screws
If loose, retighten
them.
○
Contamination and
clogging of strainer/filter
Blow air to
remove clogged
substance.
○ ○ ○
Leakage through air
valve ∗
○ ●
Piston ring ∗
○ ●
Rider ring ∗
○ ●
Ball bearing
○ ●
Bearing
∗
Needle roller
bearing
○ ●
CAUTION
The air compressor should be drained gradually by slowly loosening the drain cocks.
The inside of tank is at a high pressure. So, refrain from an abrupt cock operation,
otherwise moisture may spray out to cause a danger.