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After completing column alignment, the indicator beside the Beam Monit button may blink in red
color. If it is, click the button. The indication will become green color, indicating that it is working
correctly.
NOTICE: When you changed accelerating voltage, make electro-magnetic column alignment
referring to 3.4.3 Column Alignment Operation.
The reason that 1kV of accelerating voltage is specified for above mechanical column
alignment is that it will allow other voltage setting to be aligned only with electro-
magnetic column alignment. If you use other accelerating voltage range only, It is
recommended to make above alignment operation with the voltage.