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5. REPLACEMENT PARTS
5.1 Consumables and Spare Parts
5.1.1 Consumables
The items shown in Table 5-1 should always be on hand for normal operation.
Table 5-1 Consumables
Part No. Part Name Use Remarks
G370009 Conductive paint For protection against chargeup 30 g
G370250 Metal polishing paste For cleaning parts 50 g
G743002 Bamboo stick For cleaning parts 10 pcs
S370061 Absorbent cotton For cleaning parts
S370057 Gauze For cleaning parts
S269003 Aluminum foil For cleaning parts
585-4267 Vacuum grease (in tube) For vacuum seal (stationary part)
537-2320 Objective lens aperture plate (0.03, 0.05, 0.05, 0.1 mm dia.)
Acetone For cleaning
533-1337 Molybdenum board For baking aperture plate
S263001 Polyethylene gloves For handling parts
L474074 AIR Filter Valve open and close
45891500 Cooling water Filter DP/OBJ Cooling