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Top-notch basic performance facilitates inspections Accessories to enhance performance
High-contrast darkfield images
A new illumination
system produces a
Signal to Background
(S/B) ratio that is
nearly three times
greater than former
models. This
improves sensitivity
during darkfield
observations, enabling the detection of minute scratches
and surface irregularities within the sample, and provides
exceptionally high contrast.
CFI LU/L Plan series objectives
Illumination systems
•12V-100W halogen lamphouse
•100W mercury lamphouse
•150W metal halide
lamphouse
•75W xenon lamphouse
Stages and wafer
holders
•8x8 Stage
•8-inch (200mm) wafer holder
•6-inch (150mm) wafer holder
•6-inch (150mm) mask holder
•5-inch (125mm) mask holder
•4-inch (100mm) mask holder
DXM1200 digital camera
The DXM1200 Digital Camera achieves ultra-
high-quality digital images equivalent to
approximately 12 million output pixels, plus
has a low-noise design for clear, low-light
image capture. The camera's software can be
set to automatically categorize the images
taken, sort them and save them, all
automatically—a powerful feature when you
take a large number of photomicrographs.
SEMI S2-93A, S8-95 compliant
design
Centerable motorized
nosepiece
The sextuple motorized
nosepiece not only has
the same encoded
positioning system
offered on the Eclipse
L200, but it also offers
three adjustable objective
positions that improve
par-centricity even more.
Safeguards against
contamination
The body of this microscope is finished with electrostatic
discharge (ESD) coatings to prevent foreign particles from
adhering to it. Furthermore, the motorized nosepiece uses
a shielded center-motor that traps foreign particles inside,
preventing them from falling onto the sample.
Vibration-isolation design
Thanks to Computer-Aided
Engineering, the L200A is three
times less susceptible to
floor vibrations when
compared with conventional
models in this class. This
reduces the chance of
unwanted blur or image
shifts even during high-
magnification
observations.
6 7
Nikon's renowned CFI60 optics are the fusion of CF design
and infinity optics. These new optics feature longer working
distances and high N.A.'s. They also produce brighter
images with more contrast and reduced flare.
Optical System
A tilting trinocular eyepiece tube with a lower eyepoint
designed to be closer to the operator allows you to sit in a
more natural erect position. Microscope controls located
comfortably up-front in the microscope base minimize
hand movement, allowing you to concentrate on the
inspection process.
Fiber
Guide
Adapter
Breadth Shield
Filter Sliders Pinhole Slider
12V-100W Halogen
Lamphouse
Mercury Lamphouse
HMX-3B
Xenon Lamphouse
HMX-4
Mercury
Lampsocket
100W
Xenon
Lampsocket 75W
Metal Halide Starter
Liquid Fiber Guide
Epi
Collector
Lens
L2-TT Trinocular Tilting
Eyepiece Tube
Confocal Unit
(Under development)
YM-TI Trinocular
Eyepiece Tube
Double Port
(Under
development)
V-T Photo Adapter
CF Projection Lenses
PLI 2X, 2.5X, 4X, 5X
HMX-3
Lamphouse
Adapter
Photomicrographic System
FX-III Series
CFI LU Plan BD
Objectives
Illumination
Systems
CFI LU/L Plan
Epi Objectives
LU Nosepiece
Adapter
C-Mount/ENG-Mount TV
Zooming Adapter
Filar Micrometer
10XA
Eyepieces
CFI UW 10X
CFI UW 10XM
CFI 10X
CFI 10XM
CFI 12.5X
CFI 15X
Adapter
4-6-inch
Mask Holder
4-6-inch
Wafer Holder
8" Wafer
Holder
Motorized Scanning
Stage ISS200
8x8 Stage
L Stage for NWL860
Wafer Loader
Stages
Motorized
DIC Module
L200A
Remote
Controller
ISS200 Remote Controller
Auto Focus Module
C-Mount/ENG-Mount
CCD Camera
Digital Still Camera/
C-Mount CCD Camera
TV Adapter TV Adapter
System Diagram
ECLIPSE L200A Conventional model
Type Magnifi- N.A. W.D.
cation (mm)
CFI L Plan Epi* 2.5X 0.075 8.80
CFI LU Plan Epi* 5X 0.15 23.50
10X 0.30 17.30
20X 0.45 4.50
50X 0.80 1.00
100X 0.90 1.00
CFI LU Plan Epi ELWD* 20X 0.40 13.00
50X 0.55 10.10
100X 0.80 3.50
CFI L Plan Epi SLWD* 20X 0.35 24.00
50X 0.45 17.00
100X 0.70 6.50
CFI LU Plan Apo Epi* 150X 0.95 0.30
CFI L Plan Apo Epi WI* 150X 1.25 0.25
CFI LU Plan BD 5X 0.15 18.00
10X 0.30 15.00
20X 0.45 4.50
50X 0.80 1.00
100X 0.90 1.00
CFI LU Plan BD ELWD 20X 0.40 13.00
50X 0.55 9.80
100X 0.80 3.50
CFI LU Plan Apo BD 150X 0.90 0.42
* A nosepiece adapter is needed to use these objectives.