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Easy configuration into an automated inspection system
Programmed settings
As an inspection process varies depending on substrate,
layer, and even the operator, it has been necessary to re-
adjust settings for each inspection process.
The L200A's programming feature eliminates this process.
You just select the settings-such as observation method,
objective magnification, point to be checked, focus
position, aperture, and light intensity-and save them by
attaching appropriate file names. All you need do to begin
your inspection is just to specify the file name.
DART software (option)
AF
RS232C (Binary)
Local
Local
Scanning
stage
(ISS)
Wafer
Loader
NWL860
Local
PC
(DART Software)
(Other Software)
Other Euipment
Local
Local
RS232C
(Binary)
RS232C (Binary)
RS232C (SECS)
L200A
DIC
Confocal
DUV
Filing
System
Host
Computer
Auto In-
spection
Machine
4 5
In combination with
wafer loaders
Of course, the L200A can be configured with
Nikon's NWL-860 series of wafer loaders and
manual or motorized scanning stages to
create a wafer inspection system at a
minimum cost.
DART Software is an integrated software package
that can fully automate the inspection process.
DART combined with an NWL860 wafer loader,
ISS200 Motorized Stage and a L200A Auto Focus
offers a complete automated wafer inspection
station. DART software modules allow further
upgrades with options such as image archiving,
defect review, post probe review and online
communications.
Communication System Diagram
L200A configured with NWL-860 INX